%0 Conference Article
%T Research of influence of technological modes of “field-stop” layer creation on SPT-IGBT characteristics
%A Abrashin, P.S.
%A Krasyukov, A.Y.
%K SPT-IGBT. field-stop layer, turn-on and turn-off losses, laser annealing, MLA, high-energy alloying, Sentaurus TCAD
%J MICROELECTRONICS and INFORMATION SCIENCE-2025
%D 2025
%P 5
%I National Research University of Electronic Technology