@article{Velikorodnov2025development, author={Velikorodnov, A.V. and Borovkov, A.S. and Bondarenko, A.S.}, title={Development of a precision set of calibration measures in the coaxial path with the cross section 7/3,04}, conference={MICROELECTRONICS and INFORMATION SCIENCE-2025}, publisher={National Research University of Electronic Technology}, year={2025}, pages={30-35}, }